Improvement in mixing efficiency of microfluidic passive mixers functionalized by microstructures created with proton beam lithography

In this work, different microfluidic passive mixer devices were designed, simulated and realized. The mixing unit area was functionalized by microstructures, whose shapes layouts designed in the simulations to improve efficiency of chips. It is known that a micro wall array promising tool for device. present length areal density walls varied order find good performance. then created with ion microlithography UV lithography techniques. Mixing test performed from which efficiencies determined. found, fabricated micromixers can be improved an excellent value more densely distributed longer micro-walls.